Exclusive-China starts production of home-grown immersion DUV chipmaking tools – source

China has begun mass-producing domestically developed immersion DUV lithography machines through state-owned Shanghai Aishengna, incorporating teams from Chinese lithography startups, marking progress toward semiconductor self-sufficiency but remaining far from matching ASML's technology maturity. The machines are expected to be delivered to leading Chinese chipmakers including SMIC, Hua Hong, and CXMT, with plans to produce roughly 20 units in 2027.

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