← Back

Wire · regulatory

Exclusive-China starts production of home-grown immersion DUV chipmaking tools – source

Published

28 July 2026

Topic

regulatory

Sectors

Semiconductors

Geography

China

Source

Read at wtvbam.com

Verified

Fusion42 · 28 July 2026 · Fusion42 review

China has begun mass-producing domestically developed immersion DUV lithography machines through state-owned Shanghai Aishengna, incorporating teams from Chinese lithography startups, marking progress toward semiconductor self-sufficiency but remaining far from matching ASML's technology maturity. The machines are expected to be delivered to leading Chinese chipmakers including SMIC, Hua Hong, and CXMT, with plans to produce roughly 20 units in 2027.

This Wire brief sits within Fusion42's coverage of Semiconductors, and 22 sources have reported it between 27 Jul 2026 and 6 Aug 2026.

◆ The Wire takeaway

China now has a domestic DUV supplier path independent of ASML and Western export controls. Materials, gases, and precision component vendors serving ASML have a 24-month window to lock Chinese foundry customers before Aishengna's yield stabilises—watch SMIC's adoption rates this quarter to know if that window closes faster.

Coverage

22 sources · first reported 27 Jul 2026 · latest 6 Aug 2026

Topics

Semiconductorsduv-lithographysemiconductor-autarkychina-tech-independenceequipment-supplyexport-controls