China Mass Produces DUV Lithography Amid U.S. Restrictions

China has begun mass production of domestic deep ultraviolet (DUV) lithography equipment, breaking a U.S. export restriction and enabling local foundries to produce 28nm and below semiconductors without foreign equipment. The state-owned Shanghai firm plans to produce 5 units this year and 20 next year, supplying SMIC, Huahong, and CXMT.

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