China begins domestic production of DUV machines for semiconductor

China has begun mass production of domestically-developed immersion deep ultraviolet (DUV) lithography machines, led by state-owned Shanghai Aisheng Electronic Technology Group. The machines are intended to reduce reliance on foreign suppliers like ASML amid Western export controls and will be delivered to local chipmakers this year, though their performance is not yet on par with foreign equivalents.

This Wire brief sits within Fusion42's coverage of Semiconductors, and 22 sources have reported it between 27 Jul 2026 and 6 Aug 2026.