China begins in-house production of immersion DUV lithography equipment despite ...

A state-owned Chinese firm, Aisengna, has reportedly begun mass-producing immersion deep ultraviolet (DUV) lithography equipment, a key technology for semiconductor manufacturing previously dominated by ASML. Analysts estimate it will take China 3-10 years to close the technology gap, citing dependence on foreign components and challenges with yield and reliability.

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