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Wire · operational-macro

China stockpiled 343 immersion DUV lithography tools to bypass EUV restrictions, report finds

Published

5 October 2026

Topic

operational-macro

◆ Sectors

Semiconductors

◆ Geography

China

◆ Source

Read at news.lavx.hu →

◆ Verified

Fusion42 · 5 October 2026 · Fusion42 review

Chinese semiconductor manufacturers have accumulated 343 immersion deep-ultraviolet (DUV) lithography scanners since 2012, including 270 ASML Twinscan NXT:1980i systems capable of 7nm-class production through multipatterning, circumventing restrictions on extreme-ultraviolet (EUV) tools and highlighting gaps in export controls.

This Wire brief sits within Fusion42's coverage of Semiconductors, and 2 sources have reported it between 3 Oct 2026 and 5 Oct 2026.

◆ ◆ The Wire takeaway

You face a shifting barrier as China exploits older lithography tools to maintain chip production despite EUV bans. Reassess your supply chain dependencies and watch for tightening export controls that could reopen or close market access suddenly.

◆ Coverage

2 sources · first reported 3 Oct 2026 · latest 5 Oct 2026

◆ Related on Wire

◆ Topics

Semiconductorschinasemiconductorsexport-controlslithographyduvasml