Yuliangsheng starts mass-producing China's first DUV scanner

Shanghai Yuliangsheng, a Huawei-linked startup, has begun mass-producing China's first domestic immersion DUV lithography scanner, with SMIC trialling the tool since September 2025 and targeting production use by 2027. The machine targets 28nm single-patterning but could reach 7nm with multi-patterning techniques, using mostly Chinese components but still relying on some imported parts.

This Wire brief sits within Fusion42's coverage of Semiconductors. Wire is Fusion42's founder-focused intelligence feed: each story is connected to the funds and startups it names — every one with a live profile on Raise or Scout — so founders can follow the capital and the momentum behind the headline rather than just the headline itself. Wire analysis is one of the live surfaces Arthur reasons over.