Wire · regulatory
Yuliangsheng starts mass-producing China's first DUV scanner
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◆ Geography
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Fusion42 · 27 July 2026 · Fusion42 review
Shanghai Yuliangsheng, a Huawei-linked startup, has begun mass-producing China's first domestic immersion DUV lithography scanner, with SMIC trialling the tool since September 2025 and targeting production use by 2027. The machine targets 28nm single-patterning but could reach 7nm with multi-patterning techniques, using mostly Chinese components but still relying on some imported parts.
This Wire brief sits within Fusion42's coverage of Semiconductors, and 2 sources have reported it between 27 Jul 2026 and 28 Jul 2026.
◆ ◆ The Wire takeaway
China's export-control moat just cracked: a working domestic DUV scanner running at SMIC in 2027 means ASML loses leverage over Chinese mature-node and multi-patterned advanced flows within 18 months. Component suppliers to lithography tools and SMIC's ecosystem have a window to lock in relationships before the domestic alternative ships at volume; call SMIC's process engineers now about yield and throughput requirements that will make Yuliangsheng's machine production-ready.
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2 sources · first reported 27 Jul 2026 · latest 28 Jul 2026
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