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COXEM Targets Semiconductor Inspection Market
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Fusion42 · 8 November 2026 · Fusion42 review
COXEM and Hanbit Laser have partnered to develop automated inline semiconductor wafer inspection equipment using atmospheric-pressure scanning electron microscope technology, aiming to inspect 300mm wafers without vacuum environments and detect nanometer-scale defects. This tech targets the growing demand for microscopic defect inspection in advanced packaging products like high-bandwidth memory.
This Wire brief sits within Fusion42's coverage of Semiconductors.
◆ ◆ The Wire takeaway
You must rethink semiconductor inspection to include atmospheric-pressure SEM, which cuts vacuum prep time and fits advanced packaging like HBM. This technology opens a fresh route to offer inspection solutions to semiconductor makers refining wafer-level defect detection.
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1 source · 8 Nov 2026
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